Spatially Engraving Morphological Structure on a Polymeric Surface by Ion Beam Milling

Milling a silicon nitride membrane by focused ion beam

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Maskless milling of diamond by a focused oxygen ion beam

Recent advances in focused ion beam technology have enabled high-resolution, maskless nanofabrication using light ions. Studies with light ions to date have, however, focused on milling of materials where sub-surface ion beam damage does not inhibit device performance. Here we report on maskless milling of single crystal diamond using a focused beam of oxygen ions. Material quality is assessed ...

Magnetic nanoelements for magnetoelectronics made by focused-ion-beam milling

Focused-ion-beam ~FIB! milling has been used to structure magnetic nanoelements from 5 nm thick films of permalloy. We have used focused 30-keV Ga ions to define small arrays (6 mm 36 mm) of wires, circles, and elongated hexagons in the size range 100–500 nm. High-sensitivity magneto-optical measurements combined with atomic force microscopy show that very high quality magnetic nanostructures c...

Multifunctional carbon nanoelectrodes fabricated by focused ion beam milling.

We report a strategy for fabrication of sub-micron, multifunctional carbon electrodes and application of these electrodes as probes for scanning electrochemical microscopy (SECM) and scanning ion conductance microscopy (SICM). The fabrication process utilized chemical vapor deposition of parylene, followed by thermal pyrolysis to form conductive carbon and then further deposition of parylene to...

Nanostructuring lithium niobate substrates by focused ion beam milling